Autori: Takeo Y
| Naslov | Functional separation of biasing and sustaining voltages in two-frequency capacitively coupled plasma (Article) |
| Autori | Kitajima T Takeo Y Petrovic Zoran Lj Makabe Toshiaki |
| Info | APPLIED PHYSICS LETTERS, (2000), vol. 77 br. 4, str. 489-491 |
| Ispravka | ISI/Web of Science Elečas Rang časopisa Citati: ISI/Web of Science Scopus |
