Autori: Miyoshi Y
| Naslov | Optical emission diagnostics of etching of low-k dielectrics in a two frequency inductively coupled plasma (Article) |
| Autori | Miyauchi M Miyoshi Y Petrovic Zoran Lj Makabe Toshiaki |
| Info | SOLID-STATE ELECTRONICS, (2007), vol. 51 br. 10 , Suppl. , str. 1418 -1424 |
| Ispravka | ISI/Web of Science Članak Elečas Rang časopisa Citati: ISI/Web of Science Scopus |
| Naslov | Functional separation in two frequency operation of an inductively coupled plasma (Article) |
| Autori | Denda T Miyoshi Y Komukai Y Goto T Petrovic Zoran Lj Makabe Toshiaki |
| Info | JOURNAL OF APPLIED PHYSICS, (2004), vol. 95 br. 3, str. 870-876 |
| Ispravka | ISI/Web of Science Članak Elečas Rang časopisa Citati: ISI/Web of Science Scopus |
| Naslov | Transition between capacitive and inductive mode in inductively coupled plasma observed by emission computerized tomography (Article) |
| Autori | Miyoshi Y Petrovic Zoran Lj Makabe Toshiaki |
| Info | IEEE TRANSACTIONS ON PLASMA SCIENCE, (2002), vol. 30 br. 1, str. 130-131 |
| Ispravka | ISI/Web of Science Članak Elečas Rang časopisa Citati: ISI/Web of Science Scopus |
| Naslov | Optical computerized tomography of the E-H transition in inductively coupled plasmas in Ar and Ar-CF4 mixtures (Article) |
| Autori | Miyoshi Y Petrovic Zoran Lj Makabe Toshiaki |
| Info | JOURNAL OF PHYSICS D-APPLIED PHYSICS, (2002), vol. 35 br. 5, str. 454-461 |
| Ispravka | ISI/Web of Science Članak Elečas Rang časopisa Citati: ISI/Web of Science Scopus |
