Autori: Miyauchi M
| Naslov | Optical emission diagnostics of etching of low-k dielectrics in a two frequency inductively coupled plasma (Article) |
| Autori | Miyauchi M Miyoshi Y Petrovic Zoran Lj Makabe Toshiaki |
| Info | SOLID-STATE ELECTRONICS, (2007), vol. 51 br. 10 , Suppl. , str. 1418 -1424 |
| Ispravka | ISI/Web of Science Članak Elečas Rang časopisa Citati: ISI/Web of Science Scopus |
