Autori: Makabe Toshiaki
| Naslov | Monte Carlo analysis of ionization effects on spatiotemporal electron swarm development (Article) |
| Autori | Dujko Sasa Raspopovic Zoran M White Ronald D Makabe Toshiaki Petrovic Zoran Lj |
| Info | EUROPEAN PHYSICAL JOURNAL D, (2014), vol. 68 br. 6, str. - |
| Projekat | MNRS [ON171037, III41011]; Australian Research Council |
| Ispravka | ISI/Web of Science Članak Elečas Rang časopisa Citati: ISI/Web of Science |
| Naslov | A set of cross sections and transport coefficients for electrons in HBr (Article) |
| Autori | Sasic Olivera M Dujko Sasa Makabe Toshiaki Petrovic Zoran Lj |
| Info | CHEMICAL PHYSICS, (2012), vol. 398 br. , str. 154-159 |
| Projekat | MES[ON171037, II41011] |
| Ispravka | ISI/Web of Science Članak Elečas Rang časopisa Citati: ISI/Web of Science Scopus |
| Naslov | Argon metastable state densities in inductively coupled plasma in mixtures of Ar and O-2 (Article) |
| Autori | Hayashi Y Hirao S Zhang Y Gans T O'Connell D Petrovic Zoran Lj Makabe Toshiaki |
| Info | JOURNAL OF PHYSICS D-APPLIED PHYSICS, (2009), vol. 42 br. 14, str. - |
| Projekat | Ministry of Education, Culture, Sports, Science and Technology of Japan ; MNTRS [141025] |
| Ispravka | ISI/Web of Science Članak Elečas Rang časopisa Citati: ISI/Web of Science Scopus |
| Naslov | Optical emission diagnostics of etching of low-k dielectrics in a two frequency inductively coupled plasma (Article) |
| Autori | Miyauchi M Miyoshi Y Petrovic Zoran Lj Makabe Toshiaki |
| Info | SOLID-STATE ELECTRONICS, (2007), vol. 51 br. 10 , Suppl. , str. 1418 -1424 |
| Ispravka | ISI/Web of Science Članak Elečas Rang časopisa Citati: ISI/Web of Science Scopus |
| Naslov | Transport coefficients for electrons in mixtures of Ar and HBr (Article) |
| Autori | Sasic Olivera M Dujko Sasa Petrovic Zoran Lj Makabe Toshiaki |
| Info | JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, (2007), vol. 46 br. 6A , Suppl. , str. 3560 -3565 |
| Ispravka | ISI/Web of Science Članak Elečas Rang časopisa Citati: ISI/Web of Science Scopus |
| Naslov | Data and modeling of negative ion transport in gases of interest for production of integrated circuits and nanotechnologies (Article) |
| Autori | Petrovic Zoran Lj Raspopovic Zoran M Stojanovic Vladimir D Jovanovic Jasmina V Malovic Gordana N Makabe Toshiaki De Urquijo Jaime |
| Info | APPLIED SURFACE SCIENCE, (2007), vol. 253 br. 16, str. 6619-6640 |
| Ispravka | ISI/Web of Science Članak Elečas Rang časopisa Citati: ISI/Web of Science Scopus |
| Naslov | Transport coefficients for electrons in argon in crossed electric and magnetic rf fields (Article) |
| Autori | Raspopovic Zoran M Dujko Sasa Makabe Toshiaki Petrovic Zoran Lj |
| Info | PLASMA SOURCES SCIENCE & TECHNOLOGY, (2005), vol. 14 br. 2, str. 293-300 |
| Ispravka | ISI/Web of Science Članak Elečas Rang časopisa Citati: ISI/Web of Science Scopus |
| Naslov | Comparison of direct numerical procedure and Monte Carlo technique to determine the charging effects in submicron structures (Article) |
| Autori | Petrovic Zoran Lj Sakadzic S Spasojevic N Matsui J Makabe Toshiaki |
| Info | PROGRESS IN ADVANCED MATERIALS AND PROCESSES, (2004), vol. 453-454 br. , str. 9-14 |
| Ispravka | ISI/Web of Science Citati: ISI/Web of Science |
| Naslov | Functional separation in two frequency operation of an inductively coupled plasma (Article) |
| Autori | Denda T Miyoshi Y Komukai Y Goto T Petrovic Zoran Lj Makabe Toshiaki |
| Info | JOURNAL OF APPLIED PHYSICS, (2004), vol. 95 br. 3, str. 870-876 |
| Ispravka | ISI/Web of Science Članak Elečas Rang časopisa Citati: ISI/Web of Science Scopus |
| Naslov | Control of charging in high aspect ratio plasma etching of integrated circuits (Proceedings Paper) |
| Autori | Petrovic Zoran Lj Makabe Toshiaki |
| Info | TELSIKS 2003: 6TH INTERNATIONAL CONFERENCE ON TELECOMMUNICATIONS IN MODERN SATELLITE, CABLE AND BROADCASTING SERVICE, VOLS 1 AND 2, PROCEEDINGS OF PAPERS, (2003), vol. br. , str. 119-126 |
| Ispravka | ISI/Web of Science Citati: ISI/Web of Science |
