Autori: Hirata H
| Naslov | Diagnostics of an inductively coupled CF4/Ar plasma (Article) |
| Autori | Hioki K Hirata H Matsumura S Petrovic Zoran Lj Makabe Toshiaki |
| Info | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, (2000), vol. 18 br. 3, str. 864-872 |
| Ispravka | ISI/Web of Science Članak Elečas Rang časopisa Citati: ISI/Web of Science Scopus |
