Autori: Guillon J
Naslov | Negative ions in single and dual frequency capacitively coupled fluorocarbon plasmas (Article) |
Autori | Curley GA Maric Dragana G Booth JP Corr CS Chabert P Guillon J |
Info | PLASMA SOURCES SCIENCE & TECHNOLOGY, (2007), vol. 16 br. 1, str. S87-S93 |
Ispravka | ISI/Web of Science Članak Elečas Rang časopisa Citati: ISI/Web of Science Scopus |