Autori: Goto T
| Naslov | Functional separation in two frequency operation of an inductively coupled plasma (Article) |
| Autori | Denda T Miyoshi Y Komukai Y Goto T Petrovic Zoran Lj Makabe Toshiaki |
| Info | JOURNAL OF APPLIED PHYSICS, (2004), vol. 95 br. 3, str. 870-876 |
| Ispravka | ISI/Web of Science Članak Elečas Rang časopisa Citati: ISI/Web of Science Scopus |
