Autori: Denda T
Naslov | Functional separation in two frequency operation of an inductively coupled plasma (Article) |
Autori | Denda T Miyoshi Y Komukai Y Goto T Petrovic Zoran Lj Makabe Toshiaki |
Info | JOURNAL OF APPLIED PHYSICS, (2004), vol. 95 br. 3, str. 870-876 |
Ispravka | ISI/Web of Science Članak Elečas Rang časopisa Citati: ISI/Web of Science Scopus |