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Naslov Mass spectrometry of positive ions in capacitively coupled low pressure RF discharges in oxygen with water impurities (Article)
Autori Stefanovic Ilija M  Stojanovic Vladimir D  Boulmer-Leborgne Chantal  Lecas Thomas  Kovacevic Eva  Berndt Johannes 
Info JOURNAL OF PHYSICS D-APPLIED PHYSICS, (2016), vol. 49 br. 26, str. -
Projekat Ministry of Education, Science and Technology Development of Republic of Serbia [OI171037]; Region Centre, France
Ispravka ISI/Web of Science   Članak   Elečas   Rang časopisa   Citati: ISI/Web of Science   Scopus  
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