Autori: Barozzi M
| Naslov | Silicon selective etching by gold implantation: Feasibility and nanofabrication capabilities (Article) |
| Autori | Scattolo E Cian A Llobet J Nogue X Borrise Mondal S Barozzi M Bagolini A Crivellari M Perez Murano F Giubertoni D |
| Info | MICRO AND NANO ENGINEERING, (2025), vol. 28 br. , str. - |
| Ispravka | ISI/Web of Science Članak Elečas Rang časopisa |
| Naslov | Suppression of boron interstitial clusters in SOI using vacancy engineering (Article) |
| Autori | Smith AJ Colombeau B Gwilliam RM Cowern NEB Sealy BJ Milosavljevic Momir S Collart E Gennaro S Bersani M Barozzi M |
| Info | MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, (2005), vol. 124 br. , str. 210-214 |
| Ispravka | ISI/Web of Science Članak Elečas Rang časopisa Citati: ISI/Web of Science Scopus |
