Autori: MacGearailt Niall
| Naslov | Phase-resolved optical emission spectroscopy for an electron cyclotron resonance etcher (Article) |
| Autori | Milosavljevic Vladimir M MacGearailt Niall Cullen Patrick J Daniels Stephen Turner Miles M |
| Info | JOURNAL OF APPLIED PHYSICS, (2013), vol. 113 br. 16, str. - |
| Projekat | Science Foundation Ireland [08/SRC/I1411]; National Development Plan through the Food Institutional Research Measure; Ministry of Education and Science of the Republic of Serbia [OI171006] |
| Ispravka | ISI/Web of Science Članak Elečas Rang časopisa Citati: ISI/Web of Science Scopus |
