@ARTICLE{
author={Dastidar Avik Ghosh,Maity Reshmi,Tiwari Ramesh Chandra,Vidojevic Dejan V,Kevkic Tijana S,Nikolic Vojkan R,Das Subhajit,Maity Niladri Pratap},
year={2023},
title={Squeeze Film Effect in Surface Micromachined Nano Ultrasonic Sensor for Different Diaphragm Displacement Profiles},
journal={SENSORS},
volume={23},
number={10},
pages={-},
document_type={Article},
}