@ARTICLE{
author={Radmilovic-Radjenovic Marija D,Stojkovic Aleksandra M,Strinic Aleksandra I,Stojanovic Vladimir D,Nikitovic Zeljka D,Malovic Gordana N,Petrovic Zoran Lj},
year={2006},
title={Modeling of a plasma etcher for charging free processing of nanoscale structures},
journal={RECENT DEVELOPMENTS IN ADVANCED MATERIALS AND PROCESSES},
volume={518},
number={},
pages={57-62},
document_type={Article},
} 

@ARTICLE{
author={Benilov MS,Naidis GV,Petrovic Zoran Lj,Radmilovic-Radjenovic Marija D,Stojkovic Aleksandra M},
year={2006},
title={Escape factors for thermionic cathodes in atomic gases in a wide electric field range},
journal={JOURNAL OF PHYSICS D-APPLIED PHYSICS},
volume={39},
number={14},
pages={2959-2963},
document_type={Article},
} 

@ARTICLE{
author={Stojkovic Aleksandra M,Radmilovic-Radjenovic Marija D,Petrovic Zoran Lj},
year={2005},
title={Neutralization of ion beams for reduction of charging damage in plasma etching},
journal={CURRENT RESEARCH IN ADVANCED MATERIALS AND PROCESSES},
volume={494},
number={},
pages={297-302},
document_type={Article},
} 

@ARTICLE{
author={Radmilovic-Radjenovic Marija D,Petrovic Zoran Lj,Stojkovic Aleksandra M},
year={2004},
title={Backdiffusion of electrons in nitrogen},
journal={LIGHT SOURCES 2004},
volume={},
number={182},
pages={313-314},
document_type={Article},
} 

