@ARTICLE{
author={Shimada T,Nakamura Y,Petrovic Zoran Lj,Makabe Toshiaki},
year={2003},
title={Electron transport coefficients in SiH4 and Si2H6 in dc and rf fields},
journal={JOURNAL OF PHYSICS D-APPLIED PHYSICS},
volume={36},
number={16},
pages={1936-1946},
document_type={Article},
}