@ARTICLE{
author={Amati M,Gregoratti L,Sezen H,Grce Ana,Milosavljevic Milan M,Homewood KP},
year={2017},
title={Compositional and structural studies of ion-beam modified AlN/TiN multilayers},
journal={APPLIED SURFACE SCIENCE},
volume={411},
number={},
pages={431-436},
document_type={Article},
}