@ARTICLE{
author={Miyauchi M,Miyoshi Y,Petrovic Zoran Lj,Makabe Toshiaki},
year={2007},
title={Optical emission diagnostics of etching of low-k dielectrics in a two frequency inductively coupled plasma},
journal={SOLID-STATE ELECTRONICS},
volume={51},
number={10},
pages={1418-1424},
document_type={Article},
} 

@ARTICLE{
author={Denda T,Miyoshi Y,Komukai Y,Goto T,Petrovic Zoran Lj,Makabe Toshiaki},
year={2004},
title={Functional separation in two frequency operation of an inductively coupled plasma},
journal={JOURNAL OF APPLIED PHYSICS},
volume={95},
number={3},
pages={870-876},
document_type={Article},
} 

@ARTICLE{
author={Miyoshi Y,Petrovic Zoran Lj,Makabe Toshiaki},
year={2002},
title={Transition between capacitive and inductive mode in inductively coupled plasma observed by emission computerized tomography},
journal={IEEE TRANSACTIONS ON PLASMA SCIENCE},
volume={30},
number={1},
pages={130-131},
document_type={Article},
} 

@ARTICLE{
author={Miyoshi Y,Petrovic Zoran Lj,Makabe Toshiaki},
year={2002},
title={Optical computerized tomography of the E-H transition in inductively coupled plasmas in Ar and Ar-CF4 mixtures},
journal={JOURNAL OF PHYSICS D-APPLIED PHYSICS},
volume={35},
number={5},
pages={454-461},
document_type={Article},
}