@ARTICLE{
author={Miyauchi M,Miyoshi Y,Petrovic Zoran Lj,Makabe Toshiaki},
year={2007},
title={Optical emission diagnostics of etching of low-k dielectrics in a two frequency inductively coupled plasma},
journal={SOLID-STATE ELECTRONICS},
volume={51},
number={10},
pages={1418-1424},
document_type={Article},
}