@ARTICLE{
author={Dujko Sasa,Raspopovic Zoran M,White Ronald D,Makabe Toshiaki,Petrovic Zoran Lj},
year={2014},
title={Monte Carlo analysis of ionization effects on spatiotemporal electron swarm development},
journal={EUROPEAN PHYSICAL JOURNAL D},
volume={68},
number={6},
pages={-},
document_type={Article},
} 

@ARTICLE{
author={Sasic Olivera M,Dujko Sasa,Makabe Toshiaki,Petrovic Zoran Lj},
year={2012},
title={A set of cross sections and transport coefficients for electrons in HBr},
journal={CHEMICAL PHYSICS},
volume={398},
number={},
pages={154-159},
document_type={Article},
} 

@ARTICLE{
author={Hayashi Y,Hirao S,Zhang Y,Gans T,O'Connell D,Petrovic Zoran Lj,Makabe Toshiaki},
year={2009},
title={Argon metastable state densities in inductively coupled plasma in mixtures of Ar and O-2},
journal={JOURNAL OF PHYSICS D-APPLIED PHYSICS},
volume={42},
number={14},
pages={-},
document_type={Article},
} 

@ARTICLE{
author={Miyauchi M,Miyoshi Y,Petrovic Zoran Lj,Makabe Toshiaki},
year={2007},
title={Optical emission diagnostics of etching of low-k dielectrics in a two frequency inductively coupled plasma},
journal={SOLID-STATE ELECTRONICS},
volume={51},
number={10},
pages={1418-1424},
document_type={Article},
} 

@ARTICLE{
author={Sasic Olivera M,Dujko Sasa,Petrovic Zoran Lj,Makabe Toshiaki},
year={2007},
title={Transport coefficients for electrons in mixtures of Ar and HBr},
journal={JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS},
volume={46},
number={6A},
pages={3560-3565},
document_type={Article},
} 

@ARTICLE{
author={Petrovic Zoran Lj,Raspopovic Zoran M,Stojanovic Vladimir D,Jovanovic Jasmina V,Malovic Gordana N,Makabe Toshiaki,De Urquijo Jaime},
year={2007},
title={Data and modeling of negative ion transport in gases of interest for production of integrated circuits and nanotechnologies},
journal={APPLIED SURFACE SCIENCE},
volume={253},
number={16},
pages={6619-6640},
document_type={Article},
} 

@ARTICLE{
author={Raspopovic Zoran M,Dujko Sasa,Makabe Toshiaki,Petrovic Zoran Lj},
year={2005},
title={Transport coefficients for electrons in argon in crossed electric and magnetic rf fields},
journal={PLASMA SOURCES SCIENCE & TECHNOLOGY},
volume={14},
number={2},
pages={293-300},
document_type={Article},
} 

@ARTICLE{
author={Petrovic Zoran Lj,Sakadzic S,Spasojevic N,Matsui J,Makabe Toshiaki},
year={2004},
title={Comparison of direct numerical procedure and Monte Carlo technique to determine the charging effects in submicron structures},
journal={PROGRESS IN ADVANCED MATERIALS AND PROCESSES},
volume={453-454},
number={},
pages={9-14},
document_type={Article},
} 

@ARTICLE{
author={Denda T,Miyoshi Y,Komukai Y,Goto T,Petrovic Zoran Lj,Makabe Toshiaki},
year={2004},
title={Functional separation in two frequency operation of an inductively coupled plasma},
journal={JOURNAL OF APPLIED PHYSICS},
volume={95},
number={3},
pages={870-876},
document_type={Article},
} 

@ARTICLE{
author={Petrovic Zoran Lj,Makabe Toshiaki},
year={2003},
title={Control of charging in high aspect ratio plasma etching of integrated circuits},
journal={TELSIKS 2003: 6TH INTERNATIONAL CONFERENCE ON TELECOMMUNICATIONS IN MODERN SATELLITE, CABLE AND BROADCASTING SERVICE, VOLS 1 AND 2, PROCEEDINGS OF PAPERS},
volume={},
number={},
pages={119-126},
document_type={Proceedings Paper},
} 

@ARTICLE{
author={Shimada T,Nakamura Y,Petrovic Zoran Lj,Makabe Toshiaki},
year={2003},
title={Electron transport coefficients in SiH4 and Si2H6 in dc and rf fields},
journal={JOURNAL OF PHYSICS D-APPLIED PHYSICS},
volume={36},
number={16},
pages={1936-1946},
document_type={Article},
} 

@ARTICLE{
author={Dujko Sasa,Raspopovic Zoran M,Petrovic Zoran Lj,Makabe Toshiaki},
year={2003},
title={Negative mobilities of electrons in radio frequency fields},
journal={IEEE TRANSACTIONS ON PLASMA SCIENCE},
volume={31},
number={4},
pages={711-716},
document_type={Article},
} 

@ARTICLE{
author={Makabe Toshiaki,Petrovic Zoran Lj},
year={2002},
title={Development of optical computerized tomography in capacitively coupled plasmas and inductively coupled plasmas for plasma etching},
journal={APPLIED SURFACE SCIENCE},
volume={192},
number={1-4},
pages={88-114},
document_type={Article},
} 

@ARTICLE{
author={Petrovic Zoran Lj,Raspopovic Zoran M,Dujko Sasa,Makabe Toshiaki},
year={2002},
title={Kinetic phenomena in electron transport in radio-frequency fields},
journal={APPLIED SURFACE SCIENCE},
volume={192},
number={1-4},
pages={1-25},
document_type={Article},
} 

@ARTICLE{
author={Miyoshi Y,Petrovic Zoran Lj,Makabe Toshiaki},
year={2002},
title={Transition between capacitive and inductive mode in inductively coupled plasma observed by emission computerized tomography},
journal={IEEE TRANSACTIONS ON PLASMA SCIENCE},
volume={30},
number={1},
pages={130-131},
document_type={Article},
} 

@ARTICLE{
author={Miyoshi Y,Petrovic Zoran Lj,Makabe Toshiaki},
year={2002},
title={Optical computerized tomography of the E-H transition in inductively coupled plasmas in Ar and Ar-CF4 mixtures},
journal={JOURNAL OF PHYSICS D-APPLIED PHYSICS},
volume={35},
number={5},
pages={454-461},
document_type={Article},
} 

@ARTICLE{
author={Petrovic Zoran Lj,Raspopovic Zoran M,Makabe Toshiaki},
year={2001},
title={Non-equilibrium plasmas in telecommunication related technologies},
journal={TELSIKS 2001, VOL 1 & 2, PROCEEDINGS},
volume={},
number={},
pages={371-380},
document_type={Proceedings Paper},
} 

@ARTICLE{
author={Hioki K,Itazu N,Petrovic Zoran Lj,Makabe Toshiaki},
year={2001},
title={Optical emission spectroscopy of pulsed inductively coupled plasma in Ar},
journal={JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS},
volume={40},
number={11A},
pages={L1183-L1186},
document_type={Article},
} 

@ARTICLE{
author={Kurihara M,Petrovic Zoran Lj,Makabe Toshiaki},
year={2000},
title={Transport coefficients and scattering cross-sections for plasma modelling in CF4-Ar mixtures: a swarm analysis},
journal={JOURNAL OF PHYSICS D-APPLIED PHYSICS},
volume={33},
number={17},
pages={2146-2153},
document_type={Article},
} 

@ARTICLE{
author={Kitajima T,Takeo Y,Petrovic Zoran Lj,Makabe Toshiaki},
year={2000},
title={Functional separation of biasing and sustaining voltages in two-frequency capacitively coupled plasma},
journal={APPLIED PHYSICS LETTERS},
volume={77},
number={4},
pages={489-491},
document_type={Article},
} 

@ARTICLE{
author={Raspopovic Zoran M,Sakadzic S,Petrovic Zoran Lj,Makabe Toshiaki},
year={2000},
title={Diffusion of electrons in time-dependent E(t) x B(t) fields},
journal={JOURNAL OF PHYSICS D-APPLIED PHYSICS},
volume={33},
number={11},
pages={1298-1302},
document_type={Article},
} 

@ARTICLE{
author={Hioki K,Hirata H,Matsumura S,Petrovic Zoran Lj,Makabe Toshiaki},
year={2000},
title={Diagnostics of an inductively coupled CF4/Ar plasma},
journal={JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A},
volume={18},
number={3},
pages={864-872},
document_type={Article},
} 

@ARTICLE{
author={Raspopovic Zoran M,Sakadzic S,Petrovic Zoran Lj,Makabe Toshiaki},
year={1999},
title={Electron diffusion tensor in time dependent ExB fields},
journal={INTERNATIONAL CONFERENCE ON PHENOMENA IN IONIZED GASES, VOL IV, PROCEEDINGS},
volume={},
number={},
pages={169-170},
document_type={Proceedings Paper},
}