@ARTICLE{
author={Petrovic Zoran Lj,Malovic Gordana N,Radmilovic-Radjenovic Marija D,Puac Nevena,Maric Dragana G,Maguire PD,Mahony C},
year={2006},
title={The role of non-equilibrium plasmas and micro-discharges in top down nanotechnologies and selforganized assembly of nanostructures},
journal={2006 25th International Conference on Microelectronics, Vols 1 and 2, Proceedings},
volume={},
number={},
pages={39-46},
document_type={Proceedings Paper},
}