@ARTICLE{
author={Milosavljevic Vladimir M,MacGearailt Niall,Cullen Patrick J,Daniels Stephen,Turner Miles M},
year={2013},
title={Phase-resolved optical emission spectroscopy for an electron cyclotron resonance etcher},
journal={JOURNAL OF APPLIED PHYSICS},
volume={113},
number={16},
pages={-},
document_type={Article},
}