@ARTICLE{
author={Scattolo E,Cian A,Llobet J,Nogue X Borrise,Mondal S,Barozzi M,Bagolini A,Crivellari M,Perez Murano F,Giubertoni D},
year={2025},
title={Silicon selective etching by gold implantation: Feasibility and nanofabrication capabilities},
journal={MICRO AND NANO ENGINEERING},
volume={28},
number={},
pages={-},
document_type={Article},
}