@ARTICLE{
author={Uglov VV,Abadias G,Zlotski SV,Saladukhin IA,Skuratov Vladimir A,Leshkevich SS,Petrovic Srdjan M},
year={2015},
title={Thermal stability of nanostructured TiZrSiN thin films subjected to helium ion irradiation},
journal={NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS},
volume={354},
number={},
pages={264-268},
document_type={Article},
}