@ARTICLE{
author={Stefanovic Ilija M,Stojanovic Vladimir D,Boulmer-Leborgne Chantal,Lecas Thomas,Kovacevic Eva,Berndt Johannes},
year={2016},
title={Mass spectrometry of positive ions in capacitively coupled low pressure RF discharges in oxygen with water impurities},
journal={JOURNAL OF PHYSICS D-APPLIED PHYSICS},
volume={49},
number={26},
pages={-},
document_type={Article},
}