@ARTICLE{
author={Randjelovic Danijela V,Kozlov AG,Jaksic Olga M},
year={2014},
title={Vacuum Sensing Based on the Influence of Gas Pressure on Thermal Time Constant},
journal={2014 29TH INTERNATIONAL CONFERENCE ON MICROELECTRONICS PROCEEDINGS - MIEL 2014},
volume={},
number={},
pages={179-182},
document_type={Proceedings Paper},
}