@ARTICLE{
author={Skoro Nikola D,Puac Nevena,Lazovic Sasa S,Cvelbar Uros,Kokkoris George,Gogolides Evangelos},
year={2013},
title={Characterization and global modelling of low-pressure hydrogen-based RF plasmas suitable for surface cleaning processes},
journal={JOURNAL OF PHYSICS D-APPLIED PHYSICS},
volume={46},
number={47},
pages={-},
document_type={Article},
}