@ARTICLE{
author={Kitajima T,Takeo Y,Petrovic Zoran Lj,Makabe Toshiaki},
year={2000},
title={Functional separation of biasing and sustaining voltages in two-frequency capacitively coupled plasma},
journal={APPLIED PHYSICS LETTERS},
volume={77},
number={4},
pages={489-491},
document_type={Article},
}