@ARTICLE{
author={Hioki K,Itazu N,Petrovic Zoran Lj,Makabe Toshiaki},
year={2001},
title={Optical emission spectroscopy of pulsed inductively coupled plasma in Ar},
journal={JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS},
volume={40},
number={11A},
pages={L1183-L1186},
document_type={Article},
}