@ARTICLE{
author={Hioki K,Hirata H,Matsumura S,Petrovic Zoran Lj,Makabe Toshiaki},
year={2000},
title={Diagnostics of an inductively coupled CF4/Ar plasma},
journal={JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A},
volume={18},
number={3},
pages={864-872},
document_type={Article},
}