@ARTICLE{
author={Denda T,Miyoshi Y,Komukai Y,Goto T,Petrovic Zoran Lj,Makabe Toshiaki},
year={2004},
title={Functional separation in two frequency operation of an inductively coupled plasma},
journal={JOURNAL OF APPLIED PHYSICS},
volume={95},
number={3},
pages={870-876},
document_type={Article},
}