@ARTICLE{
author={Jokanovic Vukoman R,Bundaleski Nenad K,Petrovic Bozana,Ferarra Manuela,Jokanovic Bojan,Zivkovic Slavoljub A,Nasov Ilija},
year={2022},
title={Detailed phisyco-chemical characterization of the multilayered thin films based on titanium oxynitride and copper doped titanium nitride obtained by different PVD techniques},
journal={VACUUM},
volume={195},
number={},
pages={-},
document_type={Article},
}