@ARTICLE{
author={Smith AJ,Colombeau B,Gwilliam RM,Cowern NEB,Sealy BJ,Milosavljevic Momir S,Collart E,Gennaro S,Bersani M,Barozzi M},
year={2005},
title={Suppression of boron interstitial clusters in SOI using vacancy engineering},
journal={MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY},
volume={124},
number={},
pages={210-214},
document_type={Article},
}