@ARTICLE{
author={Balakshin Yu V,Kozhemiako AV,Petrovic Srdjan M,Eric Marko V,Shemukhin AA,Chernysh VS},
year={2019},
title={Influence of the Charge State of Xenon Ions on the Depth Distribution Profile Upon Implantation into Silicon},
journal={SEMICONDUCTORS},
volume={53},
number={8},
pages={1011-1017},
document_type={Article},
}