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author={Scattolo E,Cian A,Llobet J,Nogue X Borrise,Mondal S,Barozzi M,Bagolini A,Crivellari M,Perez Murano F,Giubertoni D},
year={2025},
title={Silicon selective etching by gold implantation: Feasibility and nanofabrication capabilities},
journal={MICRO AND NANO ENGINEERING},
volume={28},
number={},
pages={-},
document_type={Article},
} 

@ARTICLE{
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year={2005},
title={Suppression of boron interstitial clusters in SOI using vacancy engineering},
journal={MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY},
volume={124},
number={},
pages={210-214},
document_type={Article},
}