@ARTICLE{
author={Eric Marko V,Petrovic Srdjan M,Kokkoris M,Liarokapis E,Antonakos A,Telecki Igor N},
year={2013},
title={Micro-Raman depth profiling of silicon amorphization induced by high-energy ion channeling implantation},
journal={JOURNAL OF RAMAN SPECTROSCOPY},
volume={44},
number={3},
pages={496-500},
document_type={Article},
}