@ARTICLE{
author={Kokkoris M,Androulakaki EG,Czyzycki M,Eric Marko V,Karydas Andreas Germanos,Leani JJ,Mighori A,Ntemou E,Paneta V,Petrovic Snjezana B},
year={2019},
title={Argon ions deeply implanted in silicon studied by Rutherford/Elastic Backscattering and Grazing Incidence X-ray Fluorescence spectroscopy},
journal={NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS},
volume={450},
number={},
pages={144-148},
document_type={Article; Proceedings Paper},
} 

